In the magnetron sputtering process, the titanium target is one of the most commonly used targets. The titanium target has not only good adhesion but also can make a variety of beautiful colors by adding appropriate reactive gases. Titanium (Ti) has the following characteristics and advantages.
1. Titanium targets can come in many colors
Titanium targets can be made in a variety of colors, such as titanium grey, gun grey, black, imitation gold, coffee, blue, purple, etc. There are a lot of new colors you can add.
2. Good adhesion
Titanium has excellent adhesion to ceramic and glass substrates, so it can be used as a substrate material for films with poor adhesion. Titanium can also be used as a material for making film resistors or film capacitors.
3. Titanium has strong adsorption to active gas
Titanium has strong adsorption to active gas such as CO, CO2, N2, O2, and water vapor above 650 ℃. The fresh Ti film vaporized on the mercury wall forms a surface with high adsorption capacity, which has excellent aspirating performance and can react with almost all gases except the inert gas. This property makes Ti widely used as a getter in ultra-high vacuum pumping systems, such as titanium sublimation pump and sputtering ion pump.
4. Corrosion resistance
Titanium is an active metal with low equilibrium potential and high thermodynamic corrosion tendency in the medium. In fact, titanium is very stable in many media, such as titanium is corrosion resistant in such media as oxidation, neutral and weak reduction, which is because titanium and oxygen have a great affinity. In air or oxygen-containing media, the surface of titanium forms a dense, highly adherent, and the inert oxide film, which protects the titanium matrix from corrosion and will quickly heal or regenerate even due to mechanical wear. This indicates that titanium is a metal with a strong passivating tendency.
5. Biological affinity
Titanium can resist the corrosion of secretions and is non-toxic in the human body, and is suitable for any sterilization method. Therefore, it is widely used in the manufacture of medical instruments, artificial hip, knee, shoulder, side, skull, active heart valve, and bone fixation clamps. When new muscle fibers wrap around these “titanium bones,” they begin to maintain normal human activity. Titanium is a non-magnetic metal, which will not be magnetized in a large magnetic field. It is non-toxic and has a good solubility to human tissues and blood.
6. Excellent heat resistance and low-temperature resistance
The new type of titanium alloy can be used at a temperature of 600 ℃ or higher for a long time. The strength of titanium alloy TA7 (ti-5al-2.5 Sn), TC4 (ti-6al-4v) and Ti-2.5 Zr-1.5 Mo, which are represented by low-temperature titanium, increases with the decrease of temperature, but the plasticity changes little. They can keep the good ductility and toughness at the low temperature of – 196-253 ℃ and avoid cold brittleness, which are ideal materials of cryogenic storage tank containers and equipment.
7. Strong resistance to damping
Compared with steel and copper, titanium metal has the longest vibration attenuation time after mechanical vibration and electrical vibration. This performance of titanium can be used as tuning fork, vibration component of medical ultrasonic crusher and vibration film of the advanced audio speaker.
8. The tensile strength of titanium is close to the yield strength
This property of titanium indicates that its flexural strength ratio (tensile strength/yield strength) is high and that the plastic deformation of metal titanium materials is poor during forming. The ratio of yield limit and elastic modulus of titanium is large, which makes the resilience of titanium forming large.
9. Good heat transfer performance
Although the thermal conductivity of titanium metal is lower than that of carbon steel and copper, its wall thickness can be greatly reduced due to its excellent corrosion resistance. Moreover, the heat transfer mode of titanium surface and steam is dropwise condensation, which reduces the heat group, and no scale on titanium surface can also reduce the thermal resistance so that the heat transfer performance of titanium is significantly improved.
10. Low elastic modulus
The elastic modulus of titanium is 106.4GPa at room temperature, which is 57% of steel.
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